EFFECT OF SUBSTRATE BIAS ON THICKNESSES AND HARDNESS OF TiN FILM CREATED BY ARC TECHNOLOGY

Abstract

This study is aimed to investigate the influence of substrate bias on
thicknesses and hardness mechanical properties of arc deposition technology TiN
coating which is prepared on the surface of SKD61 alloy and Silic. The thicknesses
of coatings were detected by examining the cross-sectional optical microscope
image base on Silic sample. Vicker's hardness testing was carried out at four
random points for zirconium alloy. Arc deposition TiN coating on SKD61 alloy has
a maximum hardness of 2850HV achieved at the -300V substrate bias and
thicknesses about 1,96 micormet were achieved at the -100V substrate bias.