STUDYING THE INFLUENCE OF STRUCTURAL PARAMETERS ON THE DYNAMIC CHARACTERISTICS OF COMPLEX GEOMETRY MICRO-BEAMS

Abstract

This article conducts a survey to determine the characteristic dynamic parameters of two micro beams commonly used in micro-electro-mechanical devices by varying the structural parameters of the beams. The results show that the geometrical parameters of the beams directly affect the equivalent stiffness and the effective mass of the beams and change the dynamic characteristics of the vibratory system in the micro-electro-mechanical devices. The width of beams strongly affects the dynamic parameters, when the width is increased by 40%, the equivalent stiffness and the converted mass increase by 162.15% and 33.58% respectively with the folded beam; 166.44% and 40% for V-shaped beams. While, when the length is increased by 40%, the converted mass of the folded beam and V-shaped beam increases by 34% and 40% respectively, but the equivalent stiffness changes in the decreasing direction, 62.84% and 62.96% respectively for folded and V-shaped beams. These obtained results allow the designer to make necessary changes the geometrical parameters in purpose.