Three-axis piezoresistive accelerometer with adjustable axial resolution

Abstract

A three-axis piezorcsistive accelerometer which has adjusttable resolutions to three axes was developed using MicroElectroMechanical System (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable rcsolution with small cross axis sensitivity could be obtained by a three-dimensional sensoi structure.