Micro-hode fabrication in thin film Au/Pd using fimtosecond laser pulses

Abstract

In this work, we performed micro - holes fabrication in the methaUic thin film Au/Pd (80/20%) by ablation using ultrashort femtosecond laser pulses. Micro - hole diameter d ~ 2 4- 3 pm and period p “ 5 pm are produced. The micro-holes can be employed as micrometer light sources for use in point diffi'action interferometers or spatial filters.