STUDYING THE TRANSPARENT AND ELECTRICAL PROPERTIES OF ZnO:Ti THIN FILM WHICH IS PREPARED BY DC MAGNETRON SPUTTERING

Abstract

The Ti-doped ZnO films were deposited onto glass substrates from ceramic targets ZnO with various Ti concentrations using a DC magnetron sputtering. The experimental results show that all  thin films are transparent and conductive oxide films. with the appropriate Ti concentration (~ 1.5% Ti), the conductance of films can be improved. Optical characteristics of thin films was determined by UV-Vis spectroscopy. The thickness of thin films was measured by Stylus method.  The electrical resistivity was measured by four-point probe, and the roughness of films was determined by AFM.